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Sputterring and smoothing of metal surface with energetic gas cluster beams

✍ Scribed by Z. Insepov; I. Yamada; M. Sosnowski

Book ID: 114194350
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 441 KB
Volume: 54
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(98)00032-7

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