Sputtering yields versus thickness from thin copper films with 180 keV argon ions

✍ Scribed by A.M. Vincenz; P.A. Treado; J.M. Lambert; O.F. Goktepe

• Book ID: 113280369
• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 265 KB
• Volume: 40-41
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(89)90983-x