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Sputtering yields of thin overlayer films by attenuation of the substrate Auger electron signal

✍ Scribed by L. Papagno; G. Luzzi; M. Meuti

Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 386 KB
Volume: 60
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(79)90076-2

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