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Sputtering yield calculations for neutral beam particle energies

✍ Scribed by L.G. Haggmark; J.P. Biersack

Publisher: Elsevier Science
Year: 1981
Tongue: English
Weight: 475 KB
Volume: 103
Category: Article
ISSN: 0022-3115
DOI: 10.1016/0022-3115(82)90621-3

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