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Flux dependence of sputtering yield for C and B4C by high flux neutral beam

✍ Scribed by Y. Ohtsuka; M. Isobe; K. Nakano; Y. Ueda; S. Goto; M. Nishikawa

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 291 KB
Volume: 220-222
Category: Article
ISSN: 0022-3115
DOI: 10.1016/0022-3115(94)00604-0

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