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Sputtering of solid argon by keV electrons

✍ Scribed by O. Ellegaard; R. Pedrys; J. Schou; H. Sørensen; P. Børgesen


Publisher
Springer
Year
1988
Tongue
English
Weight
709 KB
Volume
46
Category
Article
ISSN
1432-0630

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Properties of YBCO films prepared by pur
✍ Toshiyuki Matsui; Takeshi Suzuki; Hiroshi Kimura; Koichi Tsuda; Megumi Nagano; K 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 202 KB

Behavior of ox)-gcn during the deposition process was investigated by an rf magnetron sputtering method with pure Ar gas. Although pure Ar gas was used as a sputtering gas, YIBa2CM3Ox(YBCO) films deposited in the pressure region from 0.2 to 2Pa showed superconductivity. It suggests that sufficient o