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Sputtering of metals: Probing and modelling the emission of atoms in different electronic states

✍ Scribed by Roger E Silverans; Jeroen Bastiaansen; Vicky Philipsen; Erno Vandeweert; Peter Lievens


Book ID
114164964
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
403 KB
Volume
182
Category
Article
ISSN
0168-583X

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