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Model for the emission of quasi-thermal atoms during sputtering of metals in the nonlinear collision cascade regime

✍ Scribed by Belykh, S. F.; Tolstoguzov, A. B.; Lozovan, A. A.; Aleshin, M. E.; Elant’ev, I. A.

Book ID: 125394749
Publisher: Springer
Year: 2014
Tongue: English
Weight: 271 KB
Volume: 118
Category: Article
ISSN: 1063-7761
DOI: 10.1134/S1063776114030029

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