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Sputtering of insulators in an RF discharge

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📜 SIMILAR VOLUMES

Sputtering of insulators in an RF discha

✍ BA Probyn 📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 470 KB

1112. Sputtering of insulators in an rf

📂 Article 📅 1968 🏛 Elsevier Science 🌐 English ⚖ 138 KB

PLASMA DIAGNOSTICS OF AN rf-SPUTTERING G

✍ Coburn, J. W. 📂 Article 📅 1971 🏛 American Institute of Physics 🌐 English ⚖ 516 KB

Optical emission diagnostics of an rf ma

✍ T. Mehdi; P.B. Legrand; J.P. Dauchot; M. Wautelet; M. Hecq 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 596 KB

Sputtering of insulators in a RF dischar

📂 Article 📅 1969 🏛 Elsevier Science 🌐 English ⚖ 213 KB

Application of RF Discharges to Sputteri

✍ Koenig, H. R.; Maissel, L. I. 📂 Article 📅 1970 🏛 IBM 🌐 English ⚖ 506 KB