✦ LIBER ✦
Sputtering of insulators in a RF discharge : B. A. Probyn, Vacuum18, No. 5 (1968), p. 253
- Book ID
- 103271082
- Publisher
- Elsevier Science
- Year
- 1969
- Tongue
- English
- Weight
- 213 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0026-2714
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