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Sputtering of graphite with light ions at energies between 20 and 1000 eV

✍ Scribed by J. Roth; J. Bohdansky


Book ID
113278423
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
307 KB
Volume
23
Category
Article
ISSN
0168-583X

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A radioactive tracer technique is described for the quantitative measurement of the sputtering yield of a target material electroplated on a copper substrate. Sputtering yields of chromium by argon and xenon ions with energies from 50 to 500eV are reported. The ion beams, having a current density ra