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Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev

✍ Scribed by Laegreid, Nils; Wehner, G. K.

Book ID: 118746709
Publisher: American Institute of Physics
Year: 1961
Tongue: English
Weight: 639 KB
Volume: 32
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1736012

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