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Sputtering of Dielectrics by High-Frequency Fields

✍ Scribed by Anderson, G. S.; Mayer, Wm. N.; Wehner, G. K.

Book ID: 120436150
Publisher: American Institute of Physics
Year: 1962
Tongue: English
Weight: 404 KB
Volume: 33
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1728549

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