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Sputtering of Al surface with very-low-energy ions

✍ Scribed by Michio Okada; Yoshitada Murata

Publisher: Elsevier Science
Year: 1993
Weight: 52 KB
Volume: 287-288
Category: Article
ISSN: 0167-2584
DOI: 10.1016/0167-2584(93)90384-u

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