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Sputtering of a polycristalline silver surface bombarded with monoenergetic argon ions of low energy (40–240 eV)

✍ Scribed by M. Koedam


Publisher
Elsevier Science
Year
1958
Weight
114 KB
Volume
24
Category
Article
ISSN
0031-8914

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✦ Synopsis


LETTER TO THE EDITOR

Sputtering of a polycristalline silver surface, bombarded with monoenergetic argon ions.of low energy. (40-240 eV)

A silver surface has been bombarded withnormally incident Ar+ ions at several well defined energies ranging from 40-240 eV (the energy spread has a half width Of 8 eV). The ions were extracted from a plasma created .by an electron beam in argon gas at low pressure (fig. 1). The electron beam was kept together by an a0dal-magnetic field (ca 800 oerstedt). The energy of the At+ ions was controlled by adjusting the potential difference of the silver surface and the .plasma; the energy distribution was measured by a special probe system. The argon pressure within the apparatus was such that the mean ~ree ~ath of-the .~puttered atoms was large compared to the tube dimensions so that back diffusion was negIigibl~)Th~ silver atoms sputtered within a certain well defined solid angle were collected on a glass plate (fig. 1). Measurements and calculations have indicated, in a first approximation, that the mass ratio of the silver deposited on the glass plate to the total amount of sputtered silver is independent of the energy of the argon ions.


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