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Sputtered neutral mass spectrometry using post-ionization in a microwave plasma

✍ Scribed by Tohru Ishitani; Noriyuki Sakudo; Hifumi Tamura; Ichiro Kanomata

Book ID
103772727
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
322 KB
Volume
67
Category
Article
ISSN
0375-9601

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Depth profiling of an In0.53Ga0.47As/InP
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✍ Higashi, Yasuhiro; Maruo, Tetsuya; Homma, Yoshikazu πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 199 KB

Depth proÐling of thin layers in InP using sputtered neutral mass spectrometry with grazing-In 0.53 Ga 0.47 As incidence ion beam sputtering and laser post-ionization was performed and compared with SIMS and AES depth proÐling. The depth resolution was improved by using grazing incidence (at an inci