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Sputter deposition system

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📜 SIMILAR VOLUMES

High rate sputter deposition system

📂 Article 📅 1974 🏛 Elsevier Science 🌐 English ⚖ 156 KB

Metal ion beam self-sputter deposition s

✍ Gotoh, Y.; Amioka, T.; Tsuji, H.; Ishikawa, J. 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 629 KB

Tungsten deposition for local interconne

✍ P.A. Hunt 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 591 KB

Collimated magnetron sputter deposition

✍ Rossnagel, S. M. 📂 Article 📅 1991 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 796 KB

Method of sputter deposition

📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 98 KB

Cold sputter deposition process

📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 122 KB