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Sputter deposition of single crystal metal multilayers

✍ Scribed by Somekh, R.E.; Baxter, C.S.

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 675 KB
Volume: 79
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(86)90425-2

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