𝔖 Bobbio Scriptorium
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Spiral patterns on salolerystals

✍ Scribed by S. Amelinckx


Book ID
104826169
Publisher
Springer
Year
1952
Tongue
English
Weight
318 KB
Volume
39
Category
Article
ISSN
0028-1042

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## Abstract Spiral inductors with various metal fill‐patterns under the spiral is fabricated with SOI CMOS technology and characterized up to 49 GHz. The impact of the fill on the inductor characteristics is found to be very small and changes can be attributed to the increase of parasitic capacitan