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Spin wave resonance in thin films and in bulk samples of FeNi invar alloys

✍ Scribed by R. Kordecki; T. Kochmann; H. Volz; J. Pelzl; E. Becker; G. Dumpich; Z. Frait


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
342 KB
Volume
161
Category
Article
ISSN
0921-4526

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## Abstract On‐wafer parameter extraction in thin‐film bulk acoustic wave resonator (FBAR) embedded on its substrate is performed. The extraction algorithm implements a multistep least‐squares optimization strategy, obtaining the equivalent‐circuit parameters of both FBAR and its substrate from exp