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Spin-on silicon dioxide films on indium antimony

✍ Scribed by N.V. Gaponenko; V.E. Borisenko; L.P. Mileshko; H. Gnaser; V.V. Vasiliev

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 624 KB
Volume: 223
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(93)90735-8

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