Spin-on-glass coatings for the generation of superpolished substrates for use in the extreme-ultraviolet region

✍ Scribed by Salmassi, Farhad ;Naulleau, Patrick P. ;Gullikson, Eric M.

• Book ID: 115352736
• Publisher: The Optical Society
• Year: 2006
• Tongue: English
• Weight: 1012 KB
• Volume: 45
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.45.002404