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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Study for piezoelectric characterization of PZT actuators deposited by RF magnetron sputtering for MEMS

✍ Scribed by Tsuchiya, Kazuyoshi; Kitagawa, Toshiaki; Nakamachi, Eiji; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro

Book ID: 120921834
Publisher: SPIE
Year: 2002
Weight: 221 KB
Volume: 4936
Category: Article
DOI: 10.1117/12.469669

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