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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - An integrated biochip design and fabrication

✍ Scribed by Zhao, Zhan; Cui, Dafu; Xia, Shanhong; Cui, Zheng; Sood, Dinesh K.; Malshe, Ajay P.; Maeda, Ryutaro

Book ID: 115495859
Publisher: SPIE
Year: 2002
Weight: 106 KB
Volume: 4936
Category: Article
DOI: 10.1117/12.469426

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