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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Advances in Metrology for X-Ray and EUV Optics IV - Using MountainsMap (Digital Surf) surface analysis software as an analysis tool for x-ray mirror optical metrology data

✍ Scribed by Duffy, Alan; Yates, Brian; Takacs, Peter; Assoufid, Lahsen; Takacs, Peter Z.; Asundi, Anand K.

Book ID: 121223879
Publisher: SPIE
Year: 2012
Weight: 729 KB
Volume: 8501
Category: Article
DOI: 10.1117/12.931646

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