SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Advances in Metrology for X-Ray and EUV Optics IV - Improved thermal stability of Mg/Co multilayer by introducing Zr barrier layer

✍ Scribed by Li, Haochuan; Zhou, Sika; Wang, Xiaoqiang; Zhu, Jingtao; Wang, Zhanshan; Assoufid, Lahsen; Takacs, Peter Z.; Asundi, Anand K.

• Book ID: 121188325
• Publisher: SPIE
• Year: 2012
• Weight: 382 KB
• Volume: 8501
• Category: Article
• DOI: 10.1117/12.929448