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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 12 August 2012)] Infrared Remote Sensing and Instrumentation XX - Inductively coupled plasma etching for delineation of InAs/GaSb pixels

✍ Scribed by Nguyen, Jean; Gill, John; Rafol, Sir B.; Soibel, Alexander; Khoshakhlagh, Arezou; Ting, David; Keo, Sam; Fisher, Anita; Luong, Edward; Liu, John; Mumolo, Jason; Gunapala, Sarath D.; Strojnik, Marija; Paez, Gonzalo

Book ID: 120053894
Publisher: SPIE
Year: 2012
Weight: 866 KB
Volume: 8511
Category: Article
DOI: 10.1117/12.930046

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