SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California (Sunday 21 August 2011)] Advances in X-Ray/EUV Optics and Components VI - The influence of working gas pressure on interlayer mixing in magnetron-deposited Mo/Si multilayers

✍ Scribed by Pershyn, Y. P.; Gullikson, E. M.; Artyukov, I. A.; Kondratenko, V. V.; Sevryukova, V. A.; Voronov, D. L.; Zubarev, E. N.; Vinogradov, A. V.; Morawe, Christian; Khounsary, Ali M.; Goto, Shunji

• Book ID: 118253345
• Publisher: SPIE
• Year: 2011
• Weight: 277 KB
• Volume: 8139
• Category: Article
• DOI: 10.1117/12.892324