SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California (Sunday 1 August 2010)] Instrumentation, Metrology, and Standards for Nanomanufacturing IV - Step height measurement by using heterodyne central fringe identification technique

✍ Scribed by Wu, W. T.; Hsieh, H. C.; Chen, Y. L.; Chang, W. Y.; Su, D. C.; Postek, Michael T.

• Book ID: 120944436
• Publisher: SPIE
• Year: 2010
• Weight: 314 KB
• Volume: 7767
• Category: Article
• DOI: 10.1117/12.860356