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SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 29 April 2013)] Infrared Technology and Applications XXXIX - MEMS clocking-cantilever thermal detector

✍ Scribed by Smith, Evan; Boroumand, Javaneh; Rezadad, Imen; Figueiredo, Pedro; Nath, Janardan; Panjwani, Deep; Peale, R. E.; Edwards, Oliver; Andresen, Bjørn F.; Fulop, Gabor F.; Hanson, Charles M.; Norton, Paul R.; Robert, Patrick

Book ID: 121331999
Publisher: SPIE
Year: 2013
Weight: 261 KB
Volume: 8704
Category: Article
DOI: 10.1117/12.2018102

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