SPIE Proceedings [SPIE Smart Nano-Micro Materials and Devices - Melbourne, Australia (Sunday 4 December 2011)] Smart Nano-Micro Materials and Devices - Development of electric power generation system for bio-MEMS device by using a new bio-compatible piezoelectric material MgSiO[sub]3[/sub]

✍ Scribed by Kuribayashi, Hideyuki; Nakamachi, Eiji; Morita, Yusuke; Juodkazis, Saulius; Gu, Min

• Book ID: 118209838
• Publisher: SPIE
• Year: 2011
• Weight: 908 KB
• Volume: 8204
• Category: Article
• DOI: 10.1117/12.903194