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SPIE Proceedings [SPIE Smart Materials, Nano- and Micro-Smart Systems - Adelaide, Australia (Sunday 10 December 2006)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III - Development of MgSiO3 biocompatible piezoelectric film for bio-MEMS actuator

✍ Scribed by Maeda, Kenjirou; Uenoya, Toshiyuki; Tsuchiya, Kazuyoshi; Uetsuji, Yasutomo; Nakamachi, Eiji; Chiao, Jung-Chih; Dzurak, Andrew S.; Jagadish, Chennupati; Thiel, David V.

Book ID: 118207167
Publisher: SPIE
Year: 2006
Weight: 483 KB
Volume: 6415
Category: Article
DOI: 10.1117/12.695753

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