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SPIE Proceedings [SPIE Smart Materials, Structures, and Systems - Bangalore, India (Thursday 12 December 2002)] Smart Materials, Structures, and Systems - Polysilicon piezoresistive pressure sensor using silicon-on-insulator (SOI) approach

โœ Scribed by Bhat, Kunchinadka Narayana H.; Bhattacharya, Enakshi; DasGupta, Amitava; DasGupta, Nandita; KotiReddy, Bhimanadhuni R.; Rao, Parimi R.; Balasubramaniam, Krishnan; Mohan, S.; Dattaguru, B.; Gopalakrishnan, S.


Book ID
118021114
Publisher
SPIE
Year
2003
Weight
253 KB
Volume
5062
Category
Article

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