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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II - Self-assembling iron silicide nanobars and structure on silicon wafer by microwave plasma method

✍ Scribed by Xu, Bei-Xue; Zhang, Yang; Zhu, He-Sun; Shen, De-Zhong; Wu, JinLei; Xue, Z. Q.; Wu, Q. D.; Chiao, Jung-Chih; Jamieson, David N.; Faraone, Lorenzo; Dzurak, Andrew S.

Book ID: 121089023
Publisher: SPIE
Year: 2005
Weight: 382 KB
Volume: 5650
Category: Article
DOI: 10.1117/12.581984

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