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SPIE Proceedings [SPIE Sixth International Symposium on Precision Mechanical Measurements - Guiyang, China (Thursday 8 August 2013)] Sixth International Symposium on Precision Mechanical Measurements - Correction on the effect of numerical aperture in optical scatterometry

✍ Scribed by Li, Weiqi; Liu, Shiyuan; Zhang, Chuanwei; Chen, Xiuguo; Gu, Honggang; Ye, Shenghua; Fei, Yetai

Book ID: 121432670
Publisher: SPIE
Year: 2013
Weight: 648 KB
Volume: 8916
Category: Article
DOI: 10.1117/12.2035546

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