SPIE Proceedings [SPIE Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life - Novosibirsk, Russia (Monday 9 September 2002)] Seventh International Symposium on Laser Metrology Applied to Science,Industry, and Everyday Life - Diffraction method for checking the sidebar defects of a small round hole

✍ Scribed by Magurin, Vitaly G.; Tarlykov, Vladimir A.; Chugui, Yuri V.; Bagayev, Sergei N.; Weckenmann, Albert; Osanna, P. Herbert

• Book ID: 121705255
• Publisher: SPIE
• Year: 2002
• Weight: 570 KB
• Volume: 4900
• Category: Article
• DOI: 10.1117/12.484599