SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - E-beam lithography: an efficient tool for the fabrication of diffractive and micro-optical elements

✍ Scribed by Kley, Ernst-Bernhard; Schnabel, Bernd; Zeitner, Uwe D.; Motamedi, M. Edward; Hornbeck, Larry J.; Pister, Kristofer S. J.

• Book ID: 121468022
• Publisher: SPIE
• Year: 1997
• Weight: 890 KB
• Volume: 3008
• Category: Article
• DOI: 10.1117/12.271417