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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Dynamics and mechanism of discrete etching of organic materials by femtosecond laser excitation

✍ Scribed by Hosokawa, Yoichiroh; Yashiro, Masaki; Asahi, Tsuyoshi; Masuhara, Hiroshi M.; Gower, Malcolm C.; Helvajian, Henry; Sugioka, Koji; Dubowski, Jan J.

Book ID: 120584434
Publisher: SPIE
Year: 2001
Weight: 622 KB
Volume: 4274
Category: Article
DOI: 10.1117/12.432499

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