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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - 157-nm laser-induced modification of fused-silica glasses

โœ Scribed by Zhang, Jie; Herman, Peter R.; Lauer, Christian; Chen, Kevin P.; Wei, Xiaoli M.; Gower, Malcolm C.; Helvajian, Henry; Sugioka, Koji; Dubowski, Jan J.


Book ID
115502324
Publisher
SPIE
Year
2001
Weight
237 KB
Volume
4274
Category
Article

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