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SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] MEMS/MOEMS Technologies and Applications III - Charge accumulation in composite dielectric layers in capacitive RF MEMS switches

✍ Scribed by Zhan, Linxian; San, Haisheng; Li, Gang; Xu, Peng; Chen, Xuyuan; Chiao, Jung-Chih; Chen, Xuyuan; Zhou, Zhaoying; Li, Xinxin

Book ID: 120173418
Publisher: SPIE
Year: 2007
Weight: 773 KB
Volume: 6836
Category: Article
DOI: 10.1117/12.756133

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