✦ LIBER ✦

SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Optical properties study of silicon oxynitride films deposited by RF magnetron sputtering

✍ Scribed by Zhu, Yong; Gu, Peifu; Ye, Hui; Shen, Weidong; Ma, Zhichun; Jin, Guofan; Chen, Xuyuan

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

SPIE Proceedings [SPIE Photonics Asia 20

✍ Li, Ming; Wang, Ming; Wang, Tinting; Rong, Hua; Chen, Xuxing; Ma, Zhichun; Jin, 📂 Article 📅 2004 🏛 SPIE ⚖ 107 KB

SPIE Proceedings [SPIE Photonics Asia 20

✍ Zhang, Yu; Lu, Xiaoxu; Luo, Yinlong; Zhong, Liyun; She, Canlin; Sheng, Yunlong; 📂 Article 📅 2005 🏛 SPIE ⚖ 133 KB

SPIE Proceedings [SPIE Photonics Asia 20

✍ Zhang, Zhijun; Sun, Jiyu; Wu, Keyong; Rao, Yun-Jiang; Kwon, Osuk Y.; Peng, Gang- 📂 Article 📅 2005 🏛 SPIE ⚖ 100 KB