✦ LIBER ✦

SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm

✍ Scribed by Li, Ming; Wang, Ming; Wang, Tinting; Rong, Hua; Chen, Xuxing; Ma, Zhichun; Jin, Guofan; Chen, Xuyuan

No coin nor oath required. For personal study only.

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