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SPIE Proceedings [SPIE Optical Engineering for Sensing and Nanotechnology (ICOSN '01) - Yokohama, Japan (Wednesday 6 June 2001)] Optical Engineering for Sensing and Nanotechnology (ICOSN 2001) - Self-reference method for phase-shift interferometry

✍ Scribed by Ge, Zongtao; Takeda, Mitsuo; Iwata, Koichi

Book ID: 118069960
Publisher: SPIE
Year: 2001
Weight: 654 KB
Volume: 4416
Category: Article
DOI: 10.1117/12.427037

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