SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Interferometry XIV: Techniques and Analysis - Angle-resolved reflectometer for thickness measurement of multi-layered thin-film structures

✍ Scribed by Joo, Woo-Deok; Schmit, Joanna; Creath, Katherine; You, Joonho; Ghim, Young-Sik; Towers, Catherine E.; Kim, Seung-Woo

• Book ID: 121231553
• Publisher: SPIE
• Year: 2008
• Weight: 338 KB
• Volume: 7063
• Category: Article
• DOI: 10.1117/12.797523