SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Full-chip lithography simulation and design analysis: how OPC is changing IC design

✍ Scribed by Spence, Chris; Mackay, R. Scott

• Book ID: 118245032
• Publisher: SPIE
• Year: 2005
• Weight: 785 KB
• Volume: 5751
• Category: Article
• DOI: 10.1117/12.608020