SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Optical Microlithography XIII - Dynamic change of transmission of CaF2 single crystals by irradiating with ArF excimer laser light

✍ Scribed by Alkemper, Jochen; Kandler, Joerg; Strenge, Lorenz; Moersen, Ewald; Muehlig, Christian; Triebel, Wolfgang; Progler, Christopher J.

• Book ID: 120502669
• Publisher: SPIE
• Year: 2000
• Weight: 771 KB
• Volume: 4000
• Category: Article
• DOI: 10.1117/12.389004