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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Microelectronics: Design, Technology, and Packaging - Diode UV detectors using oxide semiconductor thin films deposited by magnetron sputtering

✍ Scribed by Minami, Tadatsugu; Tanaka, Hideki; Shimakawa, Takahiro; Miyata, Toshihiro; Abbott, Derek; Eshraghian, Kamran; Musca, Charles A.; Pavlidis, Dimitris; Weste, Neil

Book ID: 120970065
Publisher: SPIE
Year: 2004
Weight: 86 KB
Volume: 5274
Category: Article
DOI: 10.1117/12.521590

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