SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Advanced Techniques for Integrated Circuit Processing II - On-line control of single-wafer plasma etch process

✍ Scribed by Ha, Sungdo; Sachs, Emanuel; Bondur, James A.; Castleman, Gary; Harriott, Lloyd R.; Turner, Terry R.

• Book ID: 121010783
• Publisher: SPIE
• Year: 1993
• Weight: 565 KB
• Volume: 1803
• Category: Article
• DOI: 10.1117/12.142911