SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Microelectronic Device and Multilevel Interconnection Technology II - Optimizing a manufacturing submicron CMOS process for low-voltage applications

✍ Scribed by Ma, Jun; Cheng, Sunny; Pryor, Bob; Klein, Kevin; Chen, Ih-Chin; Sasaki, Nobuo; Patel, Divyesh N.; Dixit, Girish A.

• Book ID: 115518706
• Publisher: SPIE
• Year: 1996
• Weight: 301 KB
• Volume: 2875
• Category: Article
• DOI: 10.1117/12.250857