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SPIE Proceedings [SPIE Microelectronic Manufacturing 1996 - Austin, TX (Wednesday 16 October 1996)] Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III - Optical field effect transistor with an indium tin oxide gate electrode

✍ Scribed by Fodje, J. B.; Mukherjee, D.; Hogarth, Cyril A.; DeBusk, Damon K.; Chen, Ray T.


Book ID
115512433
Publisher
SPIE
Year
1996
Weight
172 KB
Volume
2877
Category
Article

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